Inc., a major lithography light source manufacturer, today unveils a
new function, called "eTGM," available for its flagship high-output GT
Series of ArF immersion laser products. The eTGM function, a new
technology that reduces neon gas consumption by approx. 50%, was
developed as part of the EcoPhoton™ program, a roadmap to implement
Green Innovations that is being promoted by Gigaphoton.
Today, ArF immersion lasers used for leading-edge semiconductor
fabrication utilize a mixture of neon, fluorine, and argon gases as a
laser gas, with neon gas accounting for more than 96% of the laser gas
mixture. Therefore, a fairly large amount of neon gas is consumed to run
ArF immersion lasers. On the other hand, world production of neon gas
has been reduced recently, raising the possibility that the price of
neon gas will rise in the near future to cause a critical challenge to
the entire industry.
The eTGM function closely monitors the laser running status, thereby
allowing the injection amount and discharge amount of laser gas to be
optimized. By incorporating the eTGM function into the laser unit, the
consumption of neon gas can be cut by half without lowering the laser
performance. The eTGM function is provided as an option for Gigaphoton's
ArF immersion lasers, and can be incorporated into lasers already
running in the field.
In addition, along with introduction of the eTGM function, a new "green
monitoring" function is also provided as an upgrade for the paddle of
the laser. This upgrade allows the user to monitor the consumption of
laser gas in real time under a production environment.
"I am very pleased to introduce eTGM to the market as a new product from
our Green Innovations," commented Hitoshi Tomaru, President and CEO of
Gigaphoton, "We believe this technology will help our customers to
manage the gas cost in their fabs at an optimum level, thus providing an
effective measure against the risk of a rise of neon gas cost caused by
the unstable supply of this noble gas. We are committed to proceeding
with our EcoPhoton™ program to make further contributions to greening of
the semiconductor industry."
About the EcoPhoton™ Program
The EcoPhoton™ program is a roadmap started in 2003 to implement Green
Innovations. The focus is on detailed analyses of three key
cost-of-ownership (CoO) metrics: cost of consumables (CoC), cost of
downtime (CoD), and cost of environment (CoE). The program aims at
achieving continuous reduction of these costs by developing innovative
Since it was founded in 2000, Gigaphoton has developed and delivered
user-friendly, high-performance DUV laser light sources used by major
semiconductor manufacturers in the Pan-Asian, US and European regions.
Gigaphoton leads the way with cost-effective, highly productive
lithography sources for high-volume production. With a global business
outlook, Gigaphoton strives to be the world's number-one lithography
light source provider, focusing on end-user needs in every phase of its
business - from research and development to manufacturing, to
best-in-class reliability and world-class customer support.
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